Mechanical Behavior of an Electrostatically-Actuated Microbeam under Mechanical Shock

In this paper static and dynamic responses of a fixed-fixed microbeam to electrostatic force andmechanical shock for different cases have been studied. the governing equations whose solutionholds the answer to all our questions about the mechanical behavior is the nonlinear elastoelectrostaticequations. due to the nonlinearity and complexity of the derived equations analyticalsolution are not generally available; therefore, the obtained differential equations have been solvedby using of a step by step linearization method (sslm) and a galerkin based reduced ordermodel. the pull-in voltage of the structure and the effect of shock forces on the mechanicalbehavior of undeflected and electrostatically deflected microbeam have been investigated. theproposed models capture the other design parameters such as intrinsic residual stress fromfabrication processes and the nonlinear stiffening or stretching stress due to beam deflection.