characterization of the viscoelastic q-factor of electrically actuated rectangular micro-plates

Regarding the necessity of designing high q-resonators in microelectromechanical systems, this paper investigates the viscoelasticbehavior of a rectangular micro-plate subjected to electricalactuation. equations governing the vibrations of the homogeneousplate were obtained on the basis of classical plate theory(kirchhoff's model). the kelvin–voigt model was also employedto consider the viscoelastic properties. the galerkin decompositionmethod was used for decomposition of the governing differentialequations. additionally, the effects of various parameters wereinvestigated on the q-factor. furthermore, a finite elementsimulation is carried out using comsol multiphysics. theverification of the proposed model was conducted by comparingthe obtained results with those from previous studies whichrevealed the validity of the proposed approach and the accuracy ofthe assumptions made the suggested design approach proposed inthis this study is expected to design high q-factor micro resonatorsand may be used to improve the performance of many memsdevices.