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effect of cu content on structural properties of ni-cu @ a-c: h thin films
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نویسنده
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goudarzi samira ,dalouji vali
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منبع
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بيست و سومين كنفرانس شيمي فيزيك انجمن شيمي ايران - 1400 - دوره : 23 - بیست و سومین کنفرانس شیمی فیزیک انجمن شیمی ایران - کد همایش: 00210-50174 - صفحه:0 -0
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چکیده
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In this study, ni-cu nps @ a-c:h films withdifferent cu percentages, by co- depositionof rf-sputtering and rf- plasmaenhanced chemical vapor deposition (rfpecvd) were prepared using acetylene gasand ni and cu targets. the edax resultsshow that the ni and cu are presented inthe films successfully. with the increase ofcu percentages, the average diameter ofcnts was increased.
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کلیدواژه
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ni-cu thin films ,rf-pecvd system ,scanning electron microscope (sem)
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آدرس
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, iran, , iran
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پست الکترونیکی
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dalouji@yahoo.com
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Authors
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