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   analysis and prediction of surface reflection of silicon (solar cell) with regular surface microstructure based on its surface morphology using theoretical c method  
   
نویسنده dehghanpour h. r. ,parvin p. ,mortazavi s. z. ,reyhani a. ,chegenizadeh a.
منبع سومين كنفرانس ملي ميكرونانوفناوري - 1401 - دوره : 3 - سومین کنفرانس ملی میکرونانوفناوری - کد همایش: 01220-93971 - صفحه:0 -0
چکیده    Silicon, as the most abundant element in the earth s crust and the most common material used in electronic and optical equipment, has attracted the attention of many researchers to change the properties of this material to improve its electronic and optical properties. one of these efforts is to try to reduce the surface reflection of this material by using different methods. however, among these different methods, the use of lasers in creating surface microstructures has been of special importance and attention because in this method there is no need for masks and other additional materials. in this work, using theoretical methods that analyze these structures with the theorem of diffraction grating on a micrometer scale, the surface reflection of the microstructure created by excimer laser radiation on a silicon surface is simulated. theoretical c method (also known as coordinate transformation method) has produced very acceptable results in comparison with experimental results by approximating these microstructures to triangular and trapezoidal structures. with the help of these results, we were able to predict the reflective response of the microstructural surface with changes in its surface morphology.
کلیدواژه surface microstructure ,silicon ,excimer laser ,grating ,c method
آدرس , iran, , iran, , iran, , iran, , iran
پست الکترونیکی lane_2101@ymail.com
 
     
   
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