design and simulation of mems capacitive thermal sensor based on tip deflection of a functionally graded micro-beam for measuring the preheat furnace temperature (case study: zafar bonab steel complex)

Temperature sensors are used for measuring the temperature of a medium. the sensors which usually utilize in preheat furnace are more damageable with high temperatures and environment conditions. micro electro mechanical systems (mems) technology has advantages for measuring the higher temperatures. in this work, a capacitive micro thermal sensor based on tip deflection of functionally graded micro-beam (type 2) has been designed. the thermo-electro mechanical equation based on euler-bernoulli beam theory was extracted and has been solved using step-by-step linearization method. the temperature increasing was expressed with respect to changes of capacity. the consequences of beam deflection were compared well with the existing results. the obtained results were in good agreement with the other existing results which use in preheat furnaces.