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the role of methane in the growth of bilayer graphene via chemical vapor deposition on copper foil
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DOR
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20.1001.2.9919199705.1399.11.1.292.7
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نویسنده
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- - ,- - ,- - ,- -
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منبع
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كنگره مهندسي شيمي - 1399 - دوره : 11 - یازدهمین کنگره بین المللی مهندسی شیمی - کد همایش: 99191-99705
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چکیده
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A controlled synthesis of high-quality bilayer graphene by chemical vapor deposition, has attracted enormous for use in a wide range of electronic and photonic devices# although growth of graphene via chemical vapor deposition (cvd) on cu substrate has limited with low coverage, uniformity and is facing self-limiting effect, but this method has been widely accepted as a promising approach to provide graphene in a repeatable, scalable and transferable manner# in this work, we demonstrated the effect of partial pressure of methane on the growth rate of bilayer graphene and the numbar of graphene layers for a various growth conditions# we can utilize a two-step growth process for controlling the nucleation and carbon delivery for bilayer graphene#it is accepted that the second layer is formed underneath the top-layer in according to adsorption-diffusion mechanism that dominates when a large portion of metal surface are exposed# based on this mechanism,we find that concentration of ch4 and portion of availabled metal surface is critial for the formation of bilayer graphene in a low-pressure cvd process#
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کلیدواژه
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bilayer graphene ,chemical vapor deposition ,copper foil ,surface coverage
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آدرس
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tarbiat modares university, iran, tarbiat modares university, iran, nuclear science and technology research institute, iran, tarbiat modares university, iran
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Authors
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