liquid flow meter based on a thermal anemometer microsensor
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نویسنده
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sazhin o.
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منبع
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journal of applied fluid mechanics - 2016 - دوره : 9 - شماره : 4 - صفحه:1991 -1996
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چکیده
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An analytical model of a thermal anemometer sensor is developed. a thermal anemometer microsensorutilizing doped polycrystalline silicon is created. a liquid flow meter prototype based on a thermal anemometer microsensor is designed. results of the flow meter testing are presented.
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کلیدواژه
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thermal flow sensor; heat mass transfer; liquid flow meter; mems
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آدرس
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ural federal university, russia
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پست الکترونیکی
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oleg.sazhin@urfu.ru
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