A Comparative Study of PZT-Based & TiNi- Shape Memory Alloy Based MEMS Microactuators

In this paper, we are interested in drawing a comparison between pzt & tini shape memory alloy (sma) thin films using microelectromechanical systems (mems). also, we present a new hybrid heterogeneous structure. different characteristics are investigated in this comparative study. based on the comparison made, it was shown that tini-sma based microactuators can serve higher flow rates in fluid systems and at low operating voltages in comparison with that provided by pzt-based microactuators. another concluded result indicates that the fast response and the high operating frequencies are provided by pzt-based microactuators, but displacement is relatively small, whereas tini-sma has a slow response frequency and a large force-displacement. by combining tini and pzt films, we proposed in our paper a new hybrid heterogeneous structure that can utilize the unique properties of the individual bulk materials and present large displacement and multiple responses.