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Design and Analysis of A Novel Mems Capacitive Ttire Pressure Sensor With High Sensitivity and Linearity
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نویسنده
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Norouznejad Jelodar Maryam ,Azizollah Ganji Bahram
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منبع
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Majlesi Journal Of Telecommunication Devices - 2016 - دوره : 5 - شماره : 2 - صفحه:69 -75
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چکیده
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This paper is focused on a novel design of stepped diaphragm for mems capacitive pressure sensor used in tire pressure monitoring system. the structure of sensor diaphragm plays a key role for determining the sensitivity of the sensor and the non-linearity of the output. first the structures of two capacitive pressure sensors with clamped square flat diaphragms, with different thicknesses are investigated and their sensitivity and non-linearity are compared together. finally for increasing the sensitivity and linearity, a new capacitive pressure sensor with a stepped diaphragm is introduced. a numerical solution for determination of the accurate sensitivity of the sensor is presented. the results show that the sensitivity of the sensor is increased from 0.063 ff/kpa with flat diaphragm to 0.107 ff/kpa with stepped diaphragm and also the non-linearity is decreased from 2.37% to 1.857%. in this design, the sensor sensitivity and output linearity are increased simultaneously.
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کلیدواژه
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Capacitive Pressure Sensor ,Sensitivity ,Tire Pressure Monitoring System ,Linearity
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آدرس
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Babol University Of Technology, Department Of Electrical And Computer Engineering, Iran, Babol University Of Technology, Department Of Electrical And Computer Engineering, Iran
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پست الکترونیکی
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baganji@nit.ac.ir
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Authors
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