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An astigmatic detection system for polymeric cantilever-based sensors
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نویسنده
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hwu e.-t. ,liao h.-s. ,bosco f.g. ,chen c.-h. ,keller s.s. ,boisen a. ,huang k.-y.
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منبع
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journal of sensors - 2012 - دوره : 2012 - شماره : 0
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چکیده
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We demonstrate the use of an astigmatic detection system (ads) for resonance frequency identification of polymer microcantilever sensors. the ads technology is based on a dvd optical head combined with an optical microscope (om). the optical head has a signal bandwidth of 80mhz,allowing thermal fluctuation measurements on cantilever beams with a subnanometer resolution. furthermore,an external excitation can intensify the resonance amplitude,enhancing the signal- to-noise ratio. the full width at half maximum (fwhm) of the laser spot is 568nm,which facilitates read-out on potentially submicrometer-sized cantilevers. the resonant frequency of su-8 microcantilevers is measured by both thermal fluctuation and excited vibration measurement modes of the ads. copyright © 2012 en-te hwu et al.
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آدرس
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institute of physics,academia sinica,nankang, Taiwan, institute of physics,academia sinica,nankang,taipei 11529,taiwan,department of mechanical engineering,national taiwan university, Taiwan, department of micro- and nanotechnology,technical university of denmark, Denmark, institute of physics,academia sinica,nankang, Taiwan, department of micro- and nanotechnology,technical university of denmark, Denmark, department of micro- and nanotechnology,technical university of denmark, Denmark, department of mechanical engineering,national taiwan university, Taiwan
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Authors
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