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Lithography-Free,Low-Cost Method for Improving Photodiode Performance by Etching Silicon Nanocones as Antireflection Layer
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نویسنده
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jiang j. ,xu z. ,lin j. ,liu g.l.
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منبع
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journal of sensors - 2016 - دوره : 2016 - شماره : 0
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چکیده
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A three-step process has been demonstrated to improve the performance of photodiode by creating nanocone forest on the surface of photodiode as an antireflection layer. this high-throughput,low-cost process has been shown to decrease the reflectivity by 66.1%,enhance the quantum efficiency by 27%,and increase the responsivity by 25.7%. this low-cost manufacture process can be applied to increase the responsivity of silicon based photonic devices. � 2016 jing jiang et al.
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آدرس
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department of electrical and computer engineering,university of illinois at urbana-champaign,urbana,il, United States, department of electrical and computer engineering,university of illinois at urbana-champaign,urbana,il, United States, department of electrical and computer engineering,university of illinois at urbana-champaign,urbana,il, United States, department of electrical and computer engineering,university of illinois at urbana-champaign,urbana,il, United States
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Authors
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