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Fabrication and Characterization of High-Sensitivity Underwater Acoustic Multimedia Communication Devices with Thick Composite PZT Films
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نویسنده
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liu j.-c. ,cheng y.-t. ,ho s.-y. ,hung h.-s. ,chang s.-h.
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منبع
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journal of sensors - 2017 - دوره : 2017 - شماره : 0
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چکیده
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This paper presents a high-sensitivity hydrophone fabricated with a microelectromechanical systems (mems) process using epitaxial thin films grown on silicon wafers. the evaluated resonant frequency was calculated through finite-element analysis (fea). the hydrophone was designed,fabricated,and characterized by different measurements performed in a water tank,by using a pulsed sound technique with a sensitivity of-190 db ± 2 db for frequencies in the range 50-500 hz. these results indicate the high-performance miniaturized acoustic devices,which can impact a variety of technological applications. © 2017 jeng-cheng liu et al.
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آدرس
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department of electrical engineering,national taiwan ocean university,no. 2,peining rd,keelung, Taiwan, department of electrical engineering,national taiwan ocean university,no. 2,peining rd,keelung, Taiwan, department of electronic engineering,hwa-hsia university of technology,no. 111,gongzhuan rd.,zhonghe dist,new taipei city, Taiwan, department of electrical engineering,national taiwan ocean university,no. 2,peining rd,keelung, Taiwan, department of microelectronic engineering,national kaohsiung marine university,no. 142,haijhuan rd,kaohsiung, Taiwan
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Authors
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