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Flexible surface acoustic wave device with AlN film on polymer substrate
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نویسنده
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zhou j. ,dong s. ,jin h. ,feng b. ,wang d.
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منبع
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journal of control science and engineering - 2012 - دوره : 2012 - شماره : 0
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چکیده
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Surface acoustic wave device with c-axis-oriented aluminum nitride (aln) piezoelectric thin films on polymer substrates can be potentially used for development of flexible sensors,flexible microfluidic applications,microsystems,and lab-on-chip systems. in this work,the aln films have been successfully deposited on polymer substrates using the dc reactive magnetron-sputtering method at room temperature,and the xrd,sem,and afm methods reveal that low deposition pressure is beneficial to the highly c-axis-oriented aln film on polymer substrates. studies toward the development of aln thin film-based flexible surface acoustic wave devices on the polymer substrates are initiated and the experimental and simulated results demonstrate the devices showing the acoustic wave velocity of 900010000 m/s,which indicate the aln lamb wave. © 2012 jian zhou et al.
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آدرس
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department of information science and electronic engineering,zhejiang university, China, department of information science and electronic engineering,zhejiang university, China, department of information science and electronic engineering,zhejiang university, China, department of information science and electronic engineering,zhejiang university, China, department of information science and electronic engineering,zhejiang university, China
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Authors
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