Performance of piezoelectrically actuated micropump with di erent driving voltage shapes and frequencies

The eects of driving voltage waveform and frequencies on the performanceof a piezoelectrically actuated micropump are investigated in detail. a full threedimensionalpiezoelectric micropump was modeled numerically and tri electro-mechanical-uidic coupling eects have been taken into account on its interface boundaries. standardexcitation waveforms including sinusoidal, triangle, sawtooth and square shapes wereimplemented and the results were compared with each other. the real time pump owbehavior was studied in each case for dierent membrane positions. the analysis predictsthat the more sharp jump in the wave form, the more pump ow can be attained at theoutlet. square shape excitation with the sharpest instantaneous slope has the most notableoverall ow rate compared to the other types in the examined range of frequencies. thebehavior can be explained by considering the generated vortices in the ow. due to asudden jump in membrane position, the ow forms strong vortices, which magnify thediodicty of the valves.