Analytical solution for large amplitude vibrations of microbeams actuated by an electro-static force

An analytical study using variational iteration method (vim) is carried outin order to investigate the vibrations of electro-statically actuated double-clamped andsimply-supported microbeams. eects of applied voltage and residual axial load on thenonlinear natural frequency and deection of the microbeams are studied. it shows thatpre-compression in microbeams increases the amplitude of deections for a specic appliedvoltage. also, an increase in pre-tension motivates the microbeam to show more nonlinearbehavior in an applied voltage. predicted results are compared with the experimental dataavailable in the literature and also with numerical results which shows a good agreement.it is concluded that the second order approximation of the vim leads to highly accuratesolutions which are valid for a wide range of vibration amplitudes.