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The effects of thickness on magnetic properties of FeCuNbSiB sputtered thin films
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نویسنده
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shivaee h.a. ,celegato f. ,tiberto p. ,castellero a. ,baricco m. ,madaah hosseini h.r.
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منبع
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scientia iranica - 2017 - دوره : 24 - شماره : 6-F - صفحه:3521 -3525
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چکیده
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Thin films of fe73.icuinb3.isii4.7b8.2 alloy with 200, 500, and 800 nm thicknesses have been deposited by rf sputtering. their magnetic properties have been characterized using alternating gradient field magnetometer (agfm) and vibrating sample magnetometer (vsm). the effects of residual stresses investigated by nanoindentation experiments were conducted on the as-deposited samples. it is observed that the coercivity of as-deposited films is inversely proportional to the thickness in relation with the residual stress induced during sputtering.
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کلیدواژه
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Magnetic properties; Thin films; Ion sputtering; Residual stresses; Nanoindentation
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آدرس
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sharif university of technology, institute for nanoscience and nanotechnology, ایران. university of turin, department of chemistry, Italy, istituto nazionale di ricerca metrologica (inrim), Italy, istituto nazionale di ricerca metrologica (inrim), Italy, university of turin, department of chemistry, Italy, university of turin, department of chemistry, Italy, sharif university of technology, department of materials science and engineering, ایران
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Authors
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