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CO2 sensing characteristics of CuO/Spinel thin films deposited on micro-heater
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نویسنده
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oudrhiri-hassani f. ,presmanes l. ,barnabe a. ,kammouni a. ,tailhades p.
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منبع
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journal of materials and environmental science - 2015 - دوره : 6 - شماره : 12 - صفحه:3496 -3500
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چکیده
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Gas sensing films are prepared by radiofrequency sputtering method. these films are made of p-type cuo and n-type cuxfe3-xo4 semi-conductors oxides. in order to determine and to improve the co2 sensing characteristics,a micro-heater has been used as substrate on which the sensitive layer is deposited. the substrate is then placed into a chamber to operate under controlled atmosphere and to make electrical measurements. response of thin film to carbon dioxide is analyzed as a function of concentration and at different working temperatures (between 150 and 400 °c). the results show a maximum of sensitivity at 200°c with a good response time.
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کلیدواژه
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Carbon dioxide; Gas sensor; Oxides; Sputtering; Thin films
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آدرس
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lmpeq,université cadi ayyad,ensa de safi,route sidi bouzid bp 63, Morocco, institut carnot cirimat,118 route de narbonne, France, institut carnot cirimat,118 route de narbonne, France, ecole nationale supérieure d'arts et métiers de casablanca,hassan ii university of casablanca, Morocco, institut carnot cirimat,118 route de narbonne, France
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Authors
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