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determination of optical properties in germanium-carbon coatings deposited by plasma enhanced chemical vapor deposition
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نویسنده
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sousani f. ,eshaghi a. ,mozafarinia r. ,jamali h.
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منبع
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iranian journal of materials science and engineering - 2018 - دوره : 15 - شماره : 1 - صفحه:24 -30
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چکیده
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In this research, germanium-carbon coatings were deposited on zns substrates by plasma enhanced chemical vapor deposition (pecvd) using geh4 and chj precursors. optical parameters of the gel-xcx coating such as refractive index, absorption coefficient, extinction coefficient and band gap were measured by the swanepoel method based on the transmittance spectrum. the results showed that the refractive index of the gej_xcx coatings at the band of 2 to 2.2 pm decreased from 3.767 to 3.715 and the optical gap increasedfrom 0.66 to 0.72 ev as ch4: geh4 increases from 10:1 to 20:1.
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کلیدواژه
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gel-xcx ,pecvd ,optical coatings ,optical properties
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آدرس
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malek ashtar university of technology, faculty of materials science and engineering, iran, malek ashtar university of technology, faculty of materials science and engineering, iran, malek ashtar university of technology, faculty of materials science and engineering, iran, malek ashtar university of technology, faculty of materials science and engineering, iran
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پست الکترونیکی
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hossein.j6813@gmail.com
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Authors
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