Analysis, Design and Simulation of Piezoelectric Acoustic Microsensor

Abstract. this paper presents the design analysis, and simulation of piezoelectric acoustic microsensor to imitate outer hair cells (ohcs) inside the human ear. this acoustic microsensor was utilised to develop a new type of microphone. piezoelectric material pzt 5a was used as the hair cells or beams for the piezoelectric acoustic microsensor. the analysis was conducted using femlab® software to identify the corresponding length to acquire the octave band frequency ranging from 31.5 hz to 16 khz. furthermore, simulink® software was employed to simulate the performance of the acoustic microsensor. the cross section area of the beams was kept at a constant value of 9 * 9 µm and their length was varied to acquire various resonant frequencies. the suitable lengths, the half power bandwidths and the quality factors of the beams were successfully obtained using femlab®. the simulation procedure was undertaken to obtain sound power level of the beams. the length, half power bandwidth, quality factor and the sound power of the beams are important parameters in designing the acoustic microsensor.