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Accurate Determination of Pull-In Voltage For Mems Capacitive Devices With Clamped Square Diaphragm
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نویسنده
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Ganji B. A. ,Mousavi A.
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منبع
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International Journal Of Engineering - 2012 - دوره : 25 - شماره : 3 - صفحه:161 -166
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چکیده
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Accurate determination of the pull-in, or the collapse voltage is critical in the design process. in this paper an analytical method is presented that provides a more accurate determination of the pull-in voltage for mems capacitive devices with clamped square diaphragm. the method incorporates both the linearized modle of the electrostatic force and the nonlinear deflection model of a clamped square diaphragm. the capacitor structure has been designed using a low stress doped poly silicon diaphragm with a proposed thickness of 0.8 ?m and an area of 2.4 mm2, an air gap of 3.0 ?m, and a 1.0 ?m thick back plate. the value of pull-in voltage calculated using equation is about 6.85v and the finite element analysis (fea) results show that the pull-in occurs at 6.75v. the resulting pull-in voltage and deflection profile of the diaphragm are in close agreement with finite element analysis results.
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کلیدواژه
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Mems ,Capacitive Device ,Pull-In Voltage ,Diaphragm Deformation
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آدرس
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Department Of Electrical And Computer Engineering,, ایران
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Authors
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