A New Structure For 6 Bit Distributed Mems Transmission Line Phase Shifter in Ku Band

In this paper, using only 32 mems switches, a new design for 6 bit dmtl phase shifter is proposed. the reduction in number of switches in ordinary 6 bit phase shifter from 63 to 32 is due to combination of one 5.625 degree for least significant bit and 11.25 degree for the rest of the switches. in new proposed method, the die size and loss of the cpw line reduced by decreasing the number of the switches. analytical and finite element simulation with hfss and comsol software, is used for considering the performance of the proposed structure. the results showed that, maximum return loss of phase shifter and mean rms phase error are -10.5 db and1.4°, respectively. although two different micro switches are used but the pull in voltages are identical. the final configuration size is 1.5×18.5 mm², and surface micromachining process is suggested for the phase shifter manufacturing.