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Structural Properties of Post Annealed ITO Thin Films at Different Temperatures
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نویسنده
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Negin Manavizadeh ,Alireza Khodayari ,Ebrahim Asl Soleimani ,Sheida Bagherzadeh ,Mohammad Hadi Maleki
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منبع
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iranian journal of chemistry and chemical engineering - 2009 - دوره : 28 - شماره : 2 - صفحه:57 -61
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چکیده
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Indium tin oxide (ito) thin films were deposited on glass substrates by rf sputteringusing an ito ceramic target (in2o3-sno2, 90-10 wt. %). after deposition, samples were annealed atdifferent temperatures in vacuum furnace. the post vacuum annealing effects on the structural,optical and electrical properties of ito films were investigated. polycrystalline ito films have beenanalyzed in wide optical spectrum, x-ray diffraction and four point probe methods. the resultsshow that increasing the annealing temperature improves the crystallinity of the films. theresistivity of the deposited films is about 19×10-4 ωcm and falls down to 7.3×10-5 ωcm as theannealing temperature is increased to 500 °c in vacuum.
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کلیدواژه
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RF sputtering ,Indium tin oxide ,Annealing in vacuum ,Transparent conductive films
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آدرس
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university of tehran, Thin Film Laboratory, ECE Department, ایران, university of tehran, Thin Film Laboratory, ECE Department, ایران, university of tehran, Thin Film Laboratory, ECE Department, ایران, university of tehran, Thin Film Laboratory, ECE Department, ایران, Laser and Optics Research School, Nuclear Science and Technology Research Institute, ایران
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پست الکترونیکی
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manavizdeh@ee.kntu.ac.ir
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Authors
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