Nano-structual changes in N+ ion implanted nickel thin films deposited on 316 and 304 type stainless steel as a function of substrate temperature

Ni thin films of 250 nm thickness were coated on 304 and 316 types stainless steels and post n+ ion implanted with15 kev energy and a flux of 5 x 1017 n+cm-2 at 300 and 400 k substrate temperatures. the surface nano-structure ofthe samples were analysed using x-ray diffraction (xrd) and atomic force microscopy (afm). nano-structure andcrystallography of the films showed the development of ni3n(111) and ni4n(111) orientation and a decrease in thegrain size and surface roughness with increasing the substrate temperature, which can be due to the initial preferredsputtering of the grain boundaries.